Journal of Coating Technology and Innovation
OPEN ACCESS
OPEN ACCESS
1Department of Mechanical Engineering, L.J Institute of Engineering and Technology, Ahmedabad, India
2CHAMOS Matrusanstha Department of Mechanical Engineering, Chandubhai S. Patel Institute of Technology, Charotar University of Science and Technology (CHARUSAT), Changa, India.
3Department of Mechanical Engineering, McMaster Manufacturing Research Institute (MMRI), McMaster University, Hamilton, Canada
Magnetron sputtering is a physical vapor deposition (PVD) process which is a type of vacuum deposition method used for development of thin films. In PVD, vapor of material is mainly produced by two methods, which is heating and sputtering. This vapor material gets deposited on to the substrate material in the presence of vacuum. As magnetron sputtering, having different configurations, is widely used in different research areas, attempts have been made to provide detailed review of recent advancement in magnetron sputtering methods and its applications. Different configurations of magnetron sputtering process such as closed field unbalanced magnetron sputtering (CFUBMS), pulsed closed field magnetron sputtering (P-CFUBMS), high power impulse magnetron sputtering (HiPIMS) and Deep oscillation magnetron sputtering (DOMS) are discussed. HiPIMS and DOMS are the most researched techniques for deposition of high quality and well adhered coatings in recent trends. Process parameters affecting film deposition are also listed in this paper. Majorly, this paper will outline recent applications of magnetron sputtering in Micro electro mechanical systems (MEMS), lithium sulfur batteries, biomedical implants and instruments, supercapacitors, tribology and many more for improvement of mechanical, optical, biomedical and electrical properties.
1Department of Mechanical Engineering, L.J Institute of Engineering and Technology, Ahmedabad, India
2CHAMOS Matrusanstha Department of Mechanical Engineering, Chandubhai S. Patel Institute of Technology, Charotar University of Science and Technology (CHARUSAT), Changa, India.
3Department of Mechanical Engineering, McMaster Manufacturing Research Institute (MMRI), McMaster University, Hamilton, Canada
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